Microfabrication for Industrial Applications

Index

A

AAO nanoimprinting, 111

ablation techniques, 42–4

acceleration sensors, 30, 31, 157

accelerometers, 157

active microvalves, 207–10

actuation, 26, 27, 155–7, 208–10

additive processing, 74–5

adhesive microneedle backing, 258, 259

advanced microfabrication methods, 55–89

LIGA concepts, 57–8

micro-ceramic processing, 59–70

non-silicon hybrid devices, 71–4

planar lightwave circuits, 74–80

reactive ion etching, 59

silicon hybrid devices, 71–4

speciality substrates, 71

Advanced Silicon Etching (ASE), 59

agriculture, 182

Al₂O₃, 66–7, 170

ALD see atomic layer deposition

alumina, 111, 170–1

aluminium etch, 22

aluminium support frames, 162–3

amorphous materials:

micromechanical transducers, 154

oxide nanoarrays, 123–4, 125

photostructurable glass, ...