Microfabrication for Industrial Applications

Chapter 5

Micromechanical Transducers

Chapter Contents

5.1 Application Fields

5.2 Overview of Materials

5.2.1 Single Crystals

5.2.2 Amorphous Materials

5.3 Thick and Thin Film Hybrid Materials

5.4 Microactuation

5.5 Packaged Sensors

5.5.1 From Die to Device Level

5.5.2 From Device Level to System

5.6 Silicon as a Mechanical Material in Resonant Microdevices

5.6.1 Resonant Sensors

5.6.2 Diaphragms as Micromechanical Couplers

5.7 Information Society

5.7.1 Micro-Opto-Electromechanical Systems

5.8 Conclusions

References

Miniaturized micromechanical-based transducers are applied in many various scientific communities and industries. In this chapter we look into the basic concepts of this extensive and important category of devices using simple ...