September 2011
Intermediate to advanced
312 pages
8h 50m
English
Content preview from Microfabrication for Industrial Applications
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Chapter 5
Micromechanical Transducers
Chapter Contents
5.1 Application Fields
5.2 Overview of Materials
5.2.1 Single Crystals
5.2.2 Amorphous Materials
5.3 Thick and Thin Film Hybrid Materials
5.4 Microactuation
5.5 Packaged Sensors
5.5.1 From Die to Device Level
5.5.2 From Device Level to System
5.6 Silicon as a Mechanical Material in Resonant Microdevices
5.6.1 Resonant Sensors
5.6.2 Diaphragms as Micromechanical Couplers
5.7 Information Society
5.7.1 Micro-Opto-Electromechanical Systems
5.8 Conclusions
Miniaturized micromechanical-based transducers are applied in many various scientific communities and industries. In this chapter we look into the basic concepts of this extensive and important category of devices using simple ...