Chapter 4
Nanotechnology
Chapter Contents
4.1 Top-Down, Bottom-Up
4.1.1 Nanolithography
4.1.2 Introduction to the Need for New Lithographic Techniques
4.1.3 Nanolithographic Techniques
4.1.4 Top-Down Nanolithographic Principles
4.1.5 Nanolithographic Technologies for the Microelectronics Industry
Deep Ultraviolet (DUV) Lithography
Extreme Ultraviolet (EUV) Lithography
4.1.6 Nanoimprint Technology
4.1.7 Case Studies: Nanoimprint Applications
Patterned Magnetic Media
Random Access Memory
Surface-Acoustic-Wave Devices
4.1.8 Emerging Nanolithographic Technologies
Multiple E-Beam/Ion-Beam Lithography
4.1.9 Nanolithography in R&D
DUV Interference Nanolithography
EUV Interference Nanolithography
Atom Lithography
4.1.10 LIL Development ...
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