Thickness Measurement

Measurements of thickness of a thin film, while being deposited or after being deposited, and of surface undulation are required in many applications. A number of techniques to cover a large range of thickness have been developed. These techniques are based on triangulation principle, interference, polarization, and so on. Some of these techniques are described in this chapter.


This makes use of laser radiation as it can be focused to a tight spot on the surface of an object that is diffuse. A well-corrected lens images the spot on a linear array detector, which is aligned perpendicular to the optical axis of the imaging lens. Figure 10.1 shows the schematic of the instrument.

If the ...

Get Introduction to Optical Metrology now with the O’Reilly learning platform.

O’Reilly members experience books, live events, courses curated by job role, and more from O’Reilly and nearly 200 top publishers.