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Computational Lithography by Xu Ma, Gonzalo R. Arce

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Appendix A

Formula Derivation in Chapter 5

The derivation of Eq. (5.24) is as follows:

equation

(A.1) equation

Therefore,

(A.2) equation

where

(A.3) equation

and

(A.4) equation

The derivation of Eq. (5.36) is as follows:

(A.5) equation

Thus,

equation

(A.6) equation

Therefore,

(A.7) equation

whereimg. img and img are the real and the imaginary part of .

The derivation of Eq. (5.37) ...

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