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Computational Lithography by Xu Ma, Gonzalo R. Arce

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Wiley Series in Pure and Applied Optics

Founded by Stanley S. Ballard, University of Florida

Editor: Glenn Boreman, University of Central Florida, CREOL & FPCE

Barrett and Myers · Foundations of Image Science

Beiser · Holographic Scanning

Berger-Schunn · Practical Color Measurement

Boyd · Radiometry and The Detection of Optical Radiation

Buck · Fundamentals of Optical Fibers, Second Edition

Cathey · Optical Information Processing and Holography

Chuang · Physics of Optoelectronic Devices

Delone and Krainov · Fundamentals of Nonlinear Optics of Atomic Gases

Dereniak and Boreman · Infrared Detectors and Systems

Dereniak and Crowe · Optical Radiation Detectors

De Vany · Master Optical Techniques

Ersoy · Diffraction, Fourier Optics and Imaging

Gaskill · Linear Systems, Fourier Transform, and Optics

Goodman · Statistical Optics

Hobbs · Building Electro-Optical Systems: Making It All Work, Second Edition

Hudson · Infrared System Engineering

Iizuka · Elements of Photonics, Volume I: In Free Space and Special Media

Iizuka · Elements of Photonics, Volume II: For Fiber and Integrated Optics

Judd and Wyszecki · Color in Business, Science, and Industry, Third Edition

Kafri and Glatt · The Physics of Moire Metrology

Karow · Fabrication Methods for Precision Optics

Klein and Furtak · Optics, Second Edition

Ma and Arce · Computational Lithography

Malacara · Optical Shop Testing, Third Edition

Milonni and Eberly · Lasers

Nassau · The Physics and Chemistry of Color: The Fifteen Causes of Color, ...

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