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Computational Lithography
book

Computational Lithography

by Gonzalo R. Arce, Xu Ma
September 2010
Intermediate to advanced
226 pages
6h 21m
English
Wiley
Content preview from Computational Lithography

Wiley Series in Pure and Applied Optics

Founded by Stanley S. Ballard, University of Florida

Editor: Glenn Boreman, University of Central Florida, CREOL & FPCE

Barrett and Myers · Foundations of Image Science

Beiser · Holographic Scanning

Berger-Schunn · Practical Color Measurement

Boyd · Radiometry and The Detection of Optical Radiation

Buck · Fundamentals of Optical Fibers, Second Edition

Cathey · Optical Information Processing and Holography

Chuang · Physics of Optoelectronic Devices

Delone and Krainov · Fundamentals of Nonlinear Optics of Atomic Gases

Dereniak and Boreman · Infrared Detectors and Systems

Dereniak and Crowe · Optical Radiation Detectors

De Vany · Master Optical Techniques

Ersoy · Diffraction, Fourier Optics and Imaging

Gaskill · Linear Systems, Fourier Transform, and Optics

Goodman · Statistical Optics

Hobbs · Building Electro-Optical Systems: Making It All Work, Second Edition

Hudson · Infrared System Engineering

Iizuka · Elements of Photonics, Volume I: In Free Space and Special Media

Iizuka · Elements of Photonics, Volume II: For Fiber and Integrated Optics

Judd and Wyszecki · Color in Business, Science, and Industry, Third Edition

Kafri and Glatt · The Physics of Moire Metrology

Karow · Fabrication Methods for Precision Optics

Klein and Furtak · Optics, Second Edition

Ma and Arce · Computational Lithography

Malacara · Optical Shop Testing, Third Edition

Milonni and Eberly · Lasers

Nassau · The Physics and Chemistry of Color: The Fifteen Causes of Color, ...

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Publisher Resources

ISBN: 9781118043578Purchase book