September 2010
Intermediate to advanced
226 pages
6h 21m
English
Index
l2 norm criterion
aerial image
amplitude impulse response
application
dark-field
light-field
areas
interior transmission
normal boundary
tangential boundary
average coherence
approximation algorithm (ACAA)
coherent length
complex degree of coherence
contrast
convolution
kernel
matrix
corner rounding
cost sensitivity
critical dimension
cutoff frequency
data fidelity term
defocus distance
diffraction
index
orders
dose
effective source
effects
diffraction edge
thick-mask
eigenfunction
eigenvalue decomposition
eigenvalues
electric and magnetic fields
electromagnetic coupling
feasible region
feature(s)
assisting
subresolution
target
filter
Gaussian low-pass
low-pass
finite-difference time-domain (FDTD) method
first-order coherent approximation
Fourier
optics
series expansion
function
amplitude
circular step
concave
constraint
convex
cost
critical modulation transfer (CMTF)
hard threshold
hyperbolic tangent
model
modulation transfer (MTF)
objective
quadratic model
sigmoid
unit step
Haar wavelet
halftone techniques
hammer
harmonic mean
hierarchy management
IC
dimension
fabrication
manufacturing
pattern
structure
illumination
annular
circular
coherent
conventional
CQUEST
dipole
fourfold
incoherent
Köhler
off-axis (OAI)
on-axis
partially coherent (PCI)
quadrupole
QUASAR
separated
imaging system
coherent
incoherent
partially coherent
intensity
intensity imbalance
interference
International Technology Roadmap
for Semiconductors
intrinsic impedance
Kirchhoff
approximation
boundary ...
