O'Reilly logo

Computational Lithography by Xu Ma, Gonzalo R. Arce

Stay ahead with the world's most comprehensive technology and business learning platform.

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, tutorials, and more.

Start Free Trial

No credit card required

Appendix B

Manhattan Geometry

The definition of the Manhattan geometry is adopted from Ref. [58]. The a pattern has a Manhattan geometry, if at least one partition of the pattern includes a set of objects satisfying the following conditions: First, all objects are rectangles, and any two rectangles that share an entire edge are merged and considered as a single rectangular object. Second, all edges of objects have either vertical or horizontal orientation. Third, all edges have length img, where img is the minimum feature size of the pattern. A typical Manhattan geometry pattern is illustrated in Fig. B.1.

Figure B.1 Manhattan geometry.

img

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, interactive tutorials, and more.

Start Free Trial

No credit card required