Functional Materials and Advanced Manufacturing

73 Micromachining

of 0.8–5 µm for USMM. Ultrasonic horn’s duty is to transmit vibrations from trans-

ducer to tool, and it also amplies the vibration amplitudes. The nonmachining end

of the tool is xed to the horn by silver brazing to increase vibrational efciency

instead of mechanical clamping. The coupler may be used for clamping of the trans-

ducer and horn assembly. The horn can be used with different shapes such as tapered

or conical, exponential, stepped, and so on.

4.3.1.6 Process Parameters

The process parameters of USMM are categorized into workpiece and tool-related,

abrasive parameters, and vibrational a