
83 Micromachining
FIGURE 4.14 Micro-3D proles machined with ECMM [6]. (Copied with permission.)
ECMM, electrochemical micromachining.
FIGURE 4.15 Microgrooves machined by wire ECMM with 10-µm-diameter platinum
wire. [6]. (Copied with permission.) ECMM, electrochemical micromachining.
4.3.4 ELECTRODISCHARGE MICROMACHINING
Electrodischarge micromachining (EDMM) is a thermoelectric process used for
processing of electrically conductive materials which are difcult to process using
conventional techniques. It is a downscaled version of normal electrical discharge
machining (EDM). In this machining process, the desire ...