December 2017
Intermediate to advanced
430 pages
13h 44m
English
Content preview from Plasma Processing of Nanomaterials
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Plasma processing is a well-established technology that is vital to materials manufacturing in numerous industries including electronics, textiles, automobile, aerospace, and biomedical. The revolution in microelectronics over the last 30 years has been largely enabled by the ability of plasma-based tools to etch, deposit, and sculpt thin films of metal and semiconductor materials into extraordinarily precise digital circuits. Despite these achievements, fundamental research and industrial implementation of plasma technology now sit at a critical juncture. Because of limitations associated with photolithography, the conventional approach to patterning materials from the top down is approaching a physical limit. This has serious consequences ...
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