December 2017
Intermediate to advanced
430 pages
13h 44m
English
Content preview from Plasma Processing of Nanomaterials
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Modeling Aspects of Plasma-Enhanced Chemical Vapor Deposition of Carbon-Based Materials
CONTENTS
10.2 Plasma Chemistry Modeling for Plasma-Enhanced Chemical Vapor Deposition (PECVD)
10.2.2 0D Chemical Kinetics or Global Modeling
10.3 Modeling the Deposition Process for PECVD
10.3.2 Detailed Atomistic Simulations: General Overview
10.3.3.1 Hydrocarbon Reactions with a-C:H Surface Sites
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