December 2017
Intermediate to advanced
430 pages
13h 44m
English
Modeling Aspects of Plasma-Enhanced Chemical Vapor Deposition of Carbon-Based Materials
CONTENTS
10.2 Plasma Chemistry Modeling for Plasma-Enhanced Chemical Vapor Deposition (PECVD)
10.2.2 0D Chemical Kinetics or Global Modeling
10.3 Modeling the Deposition Process for PECVD
10.3.2 Detailed Atomistic Simulations: General Overview
10.3.3.1 Hydrocarbon Reactions with a-C:H Surface Sites