A
AAO template, see Anodic aluminum oxide template
Ab initio modeling, 16, 292, 305
a-C:H, see Amorphous hydrogenated carbon
Adaptive electrode (AE), 315
Adatom diffusion, 298
AE, see Adaptive electrode
AFM, see Atomic force microscopy
ALD, see Atomic layer deposition
ALE, see Atomic layer etching
All-in-one nanofabrication environment, 373
Amorphous hydrogenated carbon (a-C:H), 264–272
hydrocarbon reactions with a-C:H surface sites, 264–268
site-specific factors, 265–266
species-specific factors, 266–268
simulated a-C:H growth, 268–272
Anodic aluminum oxide (AAO) template, 192
APP, see Atmospheric pressure plasma
APPJ, see Atmospheric pressure plasma jet
APRFD, see Atmospheric pressure radio frequency discharge
Assembly and self-organization ...
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