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Plasma Processing of Nanomaterials
book

Plasma Processing of Nanomaterials

by R. Mohan Sankaran
December 2017
Intermediate to advanced
430 pages
13h 44m
English
CRC Press
Content preview from Plasma Processing of Nanomaterials

Index

A

AAO template, see Anodic aluminum oxide template

Ab initio modeling, 16, 292, 305

a-C:H, see Amorphous hydrogenated carbon

Adaptive electrode (AE), 315

Adatom diffusion, 298

AE, see Adaptive electrode

AFM, see Atomic force microscopy

ALD, see Atomic layer deposition

ALE, see Atomic layer etching

All-in-one nanofabrication environment, 373

Amorphous hydrogenated carbon (a-C:H), 264–272

hydrocarbon reactions with a-C:H surface sites, 264–268

site-specific factors, 265–266

species-specific factors, 266–268

simulated a-C:H growth, 268–272

Anodic aluminum oxide (AAO) template, 192

APP, see Atmospheric pressure plasma

APPJ, see Atmospheric pressure plasma jet

APRFD, see Atmospheric pressure radio frequency discharge

Assembly and self-organization ...

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Publisher Resources

ISBN: 9781439866771