May 2015
Intermediate to advanced
790 pages
37h 28m
English
Content preview from Electronic Engineering and Information Science
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737
Electronic Engineering and Information Science – Wang (Ed.)
© 2015 Taylor & Francis Group, London, ISBN: 978-1-138-02772-5
The influence of N2 flow rate on the structure of CrN film
L. Yao, L. Chen, Y.Q. Chen & X.X. Sun
Mudanjiang Normal College, Mudanjiang, China
Heilongjang Province Key Laboratory of superhard materials, Mudanjiang, China
D. Sun
Harbin University of Science and Technology, Harbin, China
ABSTRACT: In the process of sputtering, the phase compositions of thin film are, in order, Cr, Cr2N+Cr,
CrN with the increased flow rate of nitrogen. The pure CrN or Cr
2
N have better hardness and corrosion resis-
tance, and the phase composition of CrN can be increased by rising the flow rate of nitrogen, which improves
elasticity modulus, hardness ...
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