
189
Electronic Engineering and Information Science – Wang (Ed.)
© 2015 Taylor & Francis Group, London, ISBN: 978-1-138-02772-5
A complete electrical equivalent model for micromechanical gyroscope
C.C. Dong
School of Software, Harbin University of Science and Technology, Harbin, China
L. Yin & Q. Fu
MEMS Center, Harbin Institute Technology, Harbin, China
ABSTRACT: Analysis of the four non-ideal factors micromachined vibratory gyroscope performance im-
provement and its related theory analysis, including four non-ideal factors sensor structure modeling, build a
complete electrical equivalent model of the micromechanical gyroscope, and based on its Hspice ...