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MEMS sensors

Micro-electromechanical systems (MEMS) have been in the industry since they were first produced in the 1980s; however, the origin of the first MEMS pressure sensor dates back to the 1960s at Kulite Semiconductor, who developed a piezoresistive pressure sensor. Essentially, they incorporate miniaturized mechanical structures that interact with electronic controls. Typically, these sensors are in the 1 to 100 um geometry range. Unlike the other sensors mentioned in this chapter, MEMS mechanical structures can spin, stretch, bend, move, or alter form, which in turn affects an electrical signal. This is the signal captured and measured by one particular sensor. 

MEMS devices are manufactured in a typical silicon fabrication process ...