Problems
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9.1 Assume that boron is diffused into a uniform n-type Si sample, resulting in a net doping profile Na(x) – Nd Set up an expression relating the sheet resistance of the diffused layer to the acceptor profile Na(x) and the junction depth xj Assume that Na(x) is much greater than the background doping Nd over most of the diffused layer.
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9.2 A typical sheet resistance of a base diffusion layer is 200Ω/square.
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What should be the aspect ratio of a 10-kΩ resistor, using this diffusion?
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Draw a pattern for this resistor (see Fig. 9–12b) which uses little area for a width w = 5 μm.
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9.3 A 3-μm n-type epitaxial layer (Nd = 1016 cm–3) is grown on a p-type Si substrate. Areas of the n layer are to be junction isolated (see Fig. 9–12a ...
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