Reading List
Information about the evolution of integrated circuit technology is available at http://public.itrs.net/
Campbell, S. A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford, 2001.
Chang, C. Y., and S. M. Sze. ULSI Technology. New York: McGraw-Hill, 1996.
Chang, C. Y., and S. M. Sze. ULSI Devices. New York: John Wiley, 2000.
Howe, R. T., and C. G. Sodini. Microelectronics: An Integrated Approach. Upper Saddle River, NJ: Prentice Hall, 1997.
Jaeger, R. C. Modular Series on Solid State Devices: Vol. V. Introduction to Microelectronic Fabrication. Reading, MA: Addison-Wesley, 1988.
Rabaey, J. M. Digital Integrated Circuits. Upper Saddle River, NJ: Prentice Hall, 1996.
Seraphim, D. P., R. C. Lasky, and C. Y. ...
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