concentration resulting from the complete oxidation of SiCl
4
shifts the equilib-
rium further toward GeCl
4
by the law of mass action. Low oxygen partial
pressure has the same effect.
3.6.2 Purification from Hydroxyl Contamination
A second important aspect of MCVD chemistry is the incorporation of the
impurity OH
[30] because reduction of OH
in optical fibers to ppb levels is
essential for realization of low attenuation in the 1.3- to 1:55 mm region. Hydro-
gen species originate from three sources: diffusion of OH
from the substrate
tube during processing, impurities in the starting reagents and carrier oxygen
gas, and contamination from leaks in the chemical delivery system.
The OH
level in the fiber is controlled by the reaction
H
2
O þ Cl
2
! 2HCl þ
1
=
2