5Status of 3C‐SiC Growth and Device Technology

Peter Wellmann1, Michael Schöler1, Philipp Schuh1, Mike Jennings2, Fan Li3, Roberta Nipoti4, Andrea Severino5, Ruggero Anzalone5, Fabrizio Roccaforte6, Massimo Zimbone6, and Francesco La Via6

1Crystal Growth Lab, Materials Department 6, University of Erlangen‐Nürnberg, Martensstr. 7, 91058 Erlangen, Germany

2College of Engineering Researchers, Swansea University, Bay Campus, Fabian Way, Crymlyn Burrows, Swansea, SA1 8EN, UK

3School of Engineering, University of Warwick, Coventry, CV4 7AL, UK

4CNR‐IMM Bologna, via Gobetti 101, 40129 Bologna, Italy

5STMicroelectronics, stradale Primosole 50, 95121 CATANIA, Italy

6CNR‐IMM Strada VIII 5, 95121 Catania, Italy

5.1 Introduction, Motivation, Short Review ...

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