January 2022
Intermediate to advanced
736 pages
24h 41m
English
Content preview from Wide Bandgap Semiconductors for Power Electronics
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21Diamond Wafer Technology, Epitaxial Growth, and Device Processing
Hideaki Yamada1, Hiromitsu Kato2, Shinya Ohmagari1 and Hitoshi Umezawa1
1Diamond Wafer Team, Advanced Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology, 1‐8‐31 Midorigaoka, Ikeda, Osaka, 563‐8577, Japan
2Novel Functional Device Team, Advanced Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology, 1‐1‐1 Umezono, Tsukuba, Ibaraki, 305‐8568, Japan
21.1 Diamond Epitaxial Growth and Wafers
Several material constants of diamond are superior to those of other materials [1–3]. Owing to its high reflectivity and variety of light absorption characteristics, which are attributed to the many ...
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