
348 HIGH PERFORMANCE POLYMERS
15.2.6 Chemical Vapor Deposition
Chemical vapor deposition (CVD) of polymers is
an elegant technique to place coatings on various
substrates without using solvents [37]. However, the
equipment needed is more complicated in comparison
to conventional techniques. CVD is used in various
branches of industry for corrosion-resistant and pro-
tective coatings.
Films of poly(amic acid) and PI can be deposited by
CVD. The dianhydride and diamine monomers are co-
evaporated. The process is completely dry in nature.
The rate of vaporization must be controlled to provide
proper stoichiometric amounts of the material to be
deposited [38 ...