
xi
Preface
The disciplines of integrated circuit manufacturing (ICM) and of design
for manufacturability (DfM) related to it are extremely dynamic elds in
technical concepts and market applications. This dynamism makes writ-
ing subject matter publications and monographs both easy and difcult. It
is easy enough to provide an up-to-date snapshot of ICM DfM issues given
the breadth of disciplines and the inux of publications. But it is harder to
ensure any longevity of the existing technical solutions. Technical knowl-
edge is often already dated when presented in the press. Therefore, the focus
of this book is on trends a