Semiconductors

Migrating Industrial DfM into IC Manufacturing 33

the original ow, which would indicate the need for retro-standardizing.

However, the copy exactly methodology may work only in fewer than

50% of cases, subsequently requiring more resources for process align-

ment. Lowest cost (cost of entropy) is achieved by a exible customize/

standardize approach based on documentation comprehensive enough

to understand the differences among the ows and the consequences of

these differences. Cloning processes and their documentation should start

from creating a conceptual superprocess, comprehending all the steps and

their variations