
159
4
Fab Implementation: MfD Response
4.1 Introduction
Design for manufacturability (DfM) efforts conclude at tapeout, which is
the latest phase for changing the design database into the product data-
base. Implementation of mask data in IC manufacturing has now to create
an optimal response to DfM and synergy with the design. It should either
take advantage of DfM efforts built into mask layers or create an alternate
path for them to become less complex and costly. This chapter discusses
the handshake between the various manufacturing techniques and require-
ments for design and computed-aided design (CAD) to best meet product
line expectatio ...