Semiconductors

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5

DfM Metrics

5.1 Introduction

To quantify the design for manufacturability (DfM) success rate, one needs

tangible metrics [1]. The cost and condence level of parameters to choose

from, including all aspects of reliability, yield, and cycle time, vary by orders

of magnitude. The simplest ones are design rule checks (DRCs): A mandatory

clean DRC report policy should ensure, at least theoretically, no fallouts until

the end of the specied product lifetime. Manufacturing yield verication is

hundreds of times more expensive and statistically less signicant, as it is not

possible to test every product for every aspect of its functio ...