September 2018
Intermediate to advanced
248 pages
8h 19m
English
Content preview from Semiconductors
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78 Semiconductors: Integrated Circuit Design for Manufacturability
2.4.2 Functional, Sort, and Class Yield
Ensuring high functional sort and class yields is only possible through pro-
cess architecture based on CBC aligned with accurate modeling and reliable
components in addition to DfR, LFL (litho-friendly layout), DfT, and so on.
The design expectation is to have a design environment that would help to
deal proactively with those issues [45].
Such a set up should be supported by yield models reecting into the DR
space. Converting single-value DRs into yield models based on the distribu-
tions of pattern properties extracted from layout features would not only help
meeting all standard DRs (e.g., printability, isolation, pattern density) bu ...
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