September 2018
Intermediate to advanced
248 pages
8h 19m
English
Content preview from Semiconductors
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206 Semiconductors: Integrated Circuit Design for Manufacturability
TABLE5.3
Example of Detectability Rating in DfM Rules
Detectability Detection by Example Rank
Absolute uncertainty No design control Poor yield = High cost 10
Very remote R, P, Q, T Product failures 9
Remote P, Q, T Detectable at end of line 8
Very low P, Q, T Detectable at dedicated electrical test 7
Low R, Q Detectable by design review, custom
ORC (optical rule check)
6
Moderate Q Detectable by custom ORC 5
Moderately high Visual at defect site Would be detected by standard ORC 4
High Visual near defect site Would be detected by DRC 3
Very high Visual at block level Gross pattern density ...
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