Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications

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© 2011 by Taylor & Francis Group, LLC

Preface

According to a 2007 report entitled “Sensors: A Global Strategic Business Report,” the global sen-

sor market grew at an annual average rate of 4.5% between 2000 and 2008 and is expected to reach

US$61.4 billion by 2010. The US$11.5 billion chemical sensor market represents the largest segment

of this global sensor market. This includes chemical detection in gases, chemical detection in liquids,

ue gases and re detection, liquid quality sensors, biosensors, and medical sensors. Semiconductor-

based sensors fabricated using mature microfabrication techniques and/or novel nanotechnology

are one ...