Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications

267

© 2011 by Taylor & Francis Group, LLC

7

MEMS-Based Optical

Chemical Sensors

Huikai Xie

Department of Electrical & Computer Engineering,

University of Florida, Gainesville, FL 32611

Zhi-Mei Qi

State Key Laboratory of Transducer Technology, Institute of

electronics, ChineseAcademyofSciences, Beijing100190

CONTENTS

7.1 MEMS Introduction ..............................................................................................................268

7.1.1 MEMS Overview ......................................................................................................268

7.1.2 MEMS Fabrication ................................................................................................... ...