
MEMS-Based Optical Chemical Sensors 297
© 2011 by Taylor & Francis Group, LLC
at λ = 633 nm. Simulation with ∆N
TE
= 0.00027 and ∆N
TM
= 0.00039 indicates that the refractive
index and thickness of the protein adlayer are n
ad
=1.4 and t
ad
=3 nm. Fixing ∆N
TM
to 0.00039 but
changing ∆N
TE
to 0.0029 leads to n
ad
= 1.4667 and t
ad
= 1.5565 nm.
Another slab OWG YI sensor is schematically shown in Figure7.40, which uses a double-slit ele-
ment to divide the single-beam incident light into the two beams that were simultaneously coupled
FIGURE 7.38 (a) Principle of the multilayer slab OWG based YI, (b) conguration of the so-called dual-
polarization inter ...