Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications

MEMS-Based Optical Chemical Sensors 287

© 2011 by Taylor & Francis Group, LLC

For MEMS mirrors, tilting during large-range scanning is almost inevitable. Therefore, a mirror-

tilt-insensitive (MTI) FTS has been proposed using the dual-reective LVD MEMS mirror and a

corner-cube retroreector to compensate for the small tilting of the MEMS mirror [15]. Figure7.29a

shows the MTI-FTS concept. Both light beams from the beam splitter are directed to the dual-

reective MEMS mirror. There are one corner-cube retroreector and one xed mirror in the two

arms of the interferometer, respectively. At the rest position, the MEMS mirror is placed at the zero ...