April 2016
Intermediate to advanced
324 pages
14h 53m
English
book
Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
by Fan Ren, Stephen J Pearton
Content preview from Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
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InN-Based Chemical Sensors 141
© 2011 by Taylor & Francis Group, LLC
HCl and NaOH aqueous solutions, as shown in Figure4.10. The ISFET was rst immersed in the
HCl aqueous solution, and then NaOH was added to change the pH value of the solution from
acid to base. The pH value was in situ monitored by a pH meter (Hanna HI-111) for the compari-
son with the measured I
DS
. The result is in good agreement with that using buffer solutions. The
average current variation is 17.0 µA/pH, corresponding to a current variation ratio of 4.08%.
The gate sensitivity of the bare InN surface to pH changes in the aqueous solution was measured
using the constant ...
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