April 2016
Intermediate to advanced
324 pages
14h 53m
English
book
Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
by Fan Ren, Stephen J Pearton
Content preview from Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
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282 Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
© 2011 by Taylor & Francis Group, LLC
The generated magnetic force depends on the number of windings in the coils. With 300 wind-
ings, the maximum displacement is about 110 µm at 12 mW. If the input power exceeds 12mW,
the actuator becomes instable, showing pull-in behavior. Figure7.22a shows the interferogram of
a 1540 nm laser. In this experiment, the displacement of the actuator was about 54 µm, and an
850 nm laser was used to measure the mirror displacement. Figure7.22b shows the derived spec-
trum after Fourier analysis; the resolution was 24.5 nm at ...
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