
230 Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
© 2011 by Taylor & Francis Group, LLC
The parameter α reects the relative size of the capacitance due to the double layer and the hydroxyl
groups. This is equivalent to the parameter dened by Reference 44, and the concept of a “parallel
capacitance” C
a
and the concept of an “intrinsic buffer capacity” are identical descriptions of the
effect of the site binding. The potential δψ
m
has to be calculated separately; it depends on the eld
just outside the oxide surface, and so is determined by the charge in the semiconductor and on the
oxide surface.
Equations ...