Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications

149

© 2011 by Taylor & Francis Group, LLC

5

ZnO Thin-Film and Nanowire-

Based Sensor Applications

Y.W. Heo

School of Materials Science and Engineering, Kyungpook

National University, Daegu, 702-701, Korea

S.J. Pearton

Department of Materials Science and Engineering,

University of Florida, Gainesville, FL 32611

D.P. Norton

Department of Materials Science and Engineering,

University of Florida, Gainesville, FL 32611

F. Ren

Department of Chemical Engineering, University

of Florida, Gainesville, FL 32611

CONTENTS

5.1 Introduction .........................................................................................................................150

5.2