Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications

292 Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications

© 2011 by Taylor & Francis Group, LLC

the phase modulator, the initial phase of the MZI sensor can be adjusted to make it operate in the

linear response region. Their device works at λ = 850 nm, and has the following performance data:

Resolution of N

eff

is ∆N

eff

= 5 × 10

−9

; resolution of n

C

is ∆n

C

= 2 × 10

−8

; resolution of the chemically

induced effective increase of the layer thickness is about 2 × 10

−5

nm, corresponding to a mass

coverage of 0.01 pg/mm

2

; drift of N

eff

under laboratory conditions is smaller than 5 × 10

−8

/h; ber

insertion loss is 10