April 2016
Intermediate to advanced
324 pages
14h 53m
English
book
Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
by Fan Ren, Stephen J Pearton
Content preview from Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
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154 Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
© 2011 by Taylor & Francis Group, LLC
X-ray diffraction was used to determine the crystallinity of the phosphorus-doped ZnO lms rel-
ative to undoped ZnO lms. Based on the bulk phase diagram for ZnO-P
2
O
5
, the solid solubility of
phosphorus in ZnO should be limited and metastable. Indications that the solid solubility has been
exceeded in the lms would be the appearance of impurity phases or a saturation of dopant-relevant
material properties with increasing doping. The diffraction data shows only ZnO (000ℓ) and sub-
strate peaks. The lms are oriented in a plane as determined by a four-circle x-ray diffraction. Note
that some degradation in x-ray diffract ...
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