Compact Plasma and Focused Ion Beams

xix

Preface

This book is a result of the research work carried out since 1996 by the author

and his students and collaborators on the generation of compact wave-

assisted plasmas in the microwave regime, the physics of wave interaction

with bounded plasmas, and utilizing these narrow cross-sectional plasmas

for novel applications in nanoscience and technology.

The way compact plasmas are dened in this book presents the case where

the size of the plasma is much smaller than the free space and guided wave-

length of the waves and in most cases smaller than the cutoff dimension of

the plasma chamber. The cutoff dimension depends upon the geometrical ...