December 2013
Intermediate to advanced
392 pages
13h 29m
English
Content preview from Compact Plasma and Focused Ion Beams
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Basic Beam Studies: Extraction and Ion
Energy Distribution
Introduction
In this chapter, the ion energy distribution in the plasma source both in
the bulk plasma and near the plasma meniscus from where the beam is
extracted is studied. Measurements are taken along both the axial and
radial directions in the plasma source using ion energy analyzer (IEA)
probes. The effect of end-plugging of the multicusp (MC) on ion energy dis-
tribution has been investigated. A small quadrupole magnetic lter (QF) is
introduced at the extraction end of the MC, and its inuence on ion energy
spread is investigated. The local dependence of ion energy spread ...
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