Compact Plasma and Focused Ion Beams

165

10

Plasma Buildup by Short-Pulse, High-Power

Microwaves

Introduction

Short-pulse, high-power microwaves were earlier applied for several stud-

ies such as gaseous breakdown [1–6], pulse propagation [7], material sur-

face processing [8], excimer discharges [9], and even for environmental

amelioration [10,11]. These studies are concerned with the determination of

the breakdown of electric elds [1–6], effect on pulse propagation through a

plasma layer [7], surface modication by plasma formed near the sample [8],

sustainment of high-pressure discharges for lighting applications [9], and

environmental remediation using air plasma chemistry in the ...