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Compact Plasma and Focused Ion Beams
book

Compact Plasma and Focused Ion Beams

by Sudeep Bhattacharjee
December 2013
Intermediate to advanced
392 pages
13h 29m
English
CRC Press
Content preview from Compact Plasma and Focused Ion Beams
349
23
Focused Ion Beam Experiments
Introduction
In this chapter, the FIB experiments, including the measurements of beam
current, beam prole, and beam spot size, are presented and discussed. The
focused beam current is measured using the Faraday cup (NEC-FC 50) and
the variation of beam current with electrode potentials and different ion spe-
cies are studied. In beam prole measurements, two different techniques are
employed to intercept the beam: (i) knife edge and (ii) wire, as discussed in
Chapter 22. Both the intercepted current by the knife edge and wire and the
transmitted current recorded in the Faraday cup are used for the diagnos-
tics. ...
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Publisher Resources

ISBN: 9781466557888