
349
23
Focused Ion Beam Experiments
Introduction
In this chapter, the FIB experiments, including the measurements of beam
current, beam prole, and beam spot size, are presented and discussed. The
focused beam current is measured using the Faraday cup (NEC-FC 50) and
the variation of beam current with electrode potentials and different ion spe-
cies are studied. In beam prole measurements, two different techniques are
employed to intercept the beam: (i) knife edge and (ii) wire, as discussed in
Chapter 22. Both the intercepted current by the knife edge and wire and the
transmitted current recorded in the Faraday cup are used for the diagnos-
tics. ...