Compact Plasma and Focused Ion Beams

347Multielement Focused Ion Beam

codes for micron size-focused beams. The parameters used in simulations

such as ion current density, electron and ion temperatures, initial kinetic

energy of the ions, and so on, are taken from the experimental data. The

results for single-EL system, double-EL system, and the advantage of a beam-

limiting aperture are discussed in detail. The dependence of beam spot size

on ion temperature is demonstrated. The focusing action of the lens system

for different gas species is studied. Simulation results show that a 1 mm beam

at the PE can be focused to 10 μm using a double EL with a 0.5 mm grounded

beam-limiting a ...