December 2013
Intermediate to advanced
392 pages
13h 29m
English
Content preview from Compact Plasma and Focused Ion Beams
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16 Compact Plasma and Focused Ion Beams
References
1. O.A. Popov, S.Y. Shapoval, and M.D. Hoder Jr. 1992. 2.45 GHz microwave plas-
mas at magnetic elds below ECR, Plasma Sources Sci. Technol. 1: 7–12.
2. S.R. Douglass, C. Eddy Jr., and B.V. Weber. 1996. Faraday rotation of microwave
elds in an electron cyclotron resonance plasma, IEEE Trans. Plasma Sci. 24: 16–17.
3. S. Samukawa. 1993. Wave propagation and plasma uniformity in an electron
cyclotron resonance plasma, J. Vac. Sci. Technol. A 11: 2572–2576.
4. O.A. Popov. 1990. Electron cyclotron resonance plasmas excited by rectangular
and circular microwave modes, J. Vac. Sci. Technol. ...
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