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Compact Plasma and Focused Ion Beams
book

Compact Plasma and Focused Ion Beams

by Sudeep Bhattacharjee
December 2013
Intermediate to advanced
392 pages
13h 29m
English
CRC Press
Content preview from Compact Plasma and Focused Ion Beams
267New Experiments in Pulsed Microwaves
Figure 16.10 shows the variation of J
e
with the radius of the multicusp at a
xed power and pressure. We see that J
e
is higher and there is a better attop
at a larger radius. This can be understood from the decay rate due to radial
diffusion (Equations 16.6 through 16.8). Since
ρ
= D/
Λ
2
, for a larger radius
(hence larger
Λ
),
ρ
will be smaller and hence the plasma will diffuse out
11
10
9
8
7
J
e
in a.u.
6
5
4
3
2
1
0
010203040
10 mTorr
100 mTorr
40 mTorr
500 mTorr
a = 2.2 cm
P
o
= 50 kW
f
= 9.45 GHz
t (
µ
s)
50 60 70 80 90
FIGURE 16.9
Temporal variation of the plasma (electron) current density for different gas pressures at a
pea ...
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Publisher Resources

ISBN: 9781466557888