
170 Compact Plasma and Focused Ion Beams
10
3
I
me
t
ep
10
2
10
1
10
0
10
–1
10
–1
10
–2
10
–2
10
–1
10
–1
10
0
10
0
10
10
me
me
FIGURE 10.4
Variations of the peak electron current I
me
and its buildup time t
ep
with pressure p. (Reprinted with
permission from S. Bhattacharjee, H. Amemiya, and Y. Yano. 2001. Plasma build-up by short-pulse
high-power microwaves, J. Appl. Phys. 89: 3573. Copyright 2001, American Institute of Physics.)
10
1
I
mo
mo
10
0
10
–1
10
–2
10
–1
10
0
10
1
0
t
op
(µs)
t
op
2
4
6
8
FIGURE 10.5
Variation of the peak of the total optical intensity I
mo
and buildup time t
op
with pressure p.
(Reprinted with permission from S. Bhattacharjee, ...