Compact Plasma and Focused Ion Beams

135Plasma Production in Pulsed-Mode Microwaves

part, about t = (0−1) μs, occurs on the fastest time scale, while the second part,

t = (1−6) μs, decays at a relatively slower rate. The third part is a bump simi-

lar to that observed in N

2

, but at the same pressure (for, e.g., 0.24 Torr), the

bump is smaller as compared to that of the N

2

discharge. The demarcation of

the rst and second part of the decay is seen to be pronounced at 0.58 Torr,

appearing as a splitting as shown in Figure 8.8. The splitting, however, dis-

appeared as p was raised beyond 0.6 Torr, where it was difcult to get a stable

discharge. Here, also, the solid curve represen