Compact Plasma and Focused Ion Beams

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Multielement Focused Ion Beam

Introduction

In this chapter, simulations for designing the beam column of the ME-FIB

system are discussed. Widely known and commercially available beam sim-

ulation codes, namely, AXCEL-INP and SIMION, are employed for obtaining

beam trajectory and emittance. Einzel lenses (ELs) are designed for electro-

static focusing of the ion beam. The effect of various parameters such as elec-

trode geometry, applied extraction voltage, space charge in the beam, shape

of the plasma boundary, and so on, on beam optics is looked at. The plasma

parameters obtained from previous experiments are used in the simulations.

This st ...