Compact Plasma and Focused Ion Beams

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Experimental Setup for Basic Plasma Studies

Introduction

In this chapter, the experimental setup used for basic plasma experiments

for ion beam extraction is described. The plasma (ion) source, including the

microwave (MW) system, vacuum chamber, pumping system, multicusp

plasma connement device, probes for plasma diagnostics, and other exper-

imental accessories, is described in detail. The plasma source from which

ions are extracted and focused forms one of the most important components

of the multi element FIB system.

Figure 20.1 shows a schematic of the experimental apparatus comprising

the plasma (ion) source. The apparatus consists of ...