Compact Plasma and Focused Ion Beams

140 Compact Plasma and Focused Ion Beams

considering the change of T

e

. Solid lines in Figure 8.8 labeled as 1, 2 show

the result of numerical simulation of the rst and second parts of the decay

at 0.24 and 0.58 Torr, respectively. The decay at the lower p could be tted

rather well. The higher p exhibited a splitting with a rise in the ion density.

The reason for the splitting is not known, and one possibility could be the

generation of NO

x

ions (e.g., NO

+

,

NO

2

+

,

etc.), which have not been taken into

consideration in our model.

The experimental data tted with curves 1 and 2 represent the following

dimensionless parameter values. Sufxes I a ...